Grandly Automation Ltd

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Product name : 3155107-001C - AE
Product No. : 3155107-001C - AE
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  Details:
   Grandly Automation Ltd
 
Attn: Sofina
 
 
Manufacture:AE
 
MODEL:



1.stepper controller 0100-20173
2.Oregon Micro Systems 0190-09939
3.Analog I/O Board 0100-20100
4.System Electronics Interface 0100-20001
5.RF Match 0010-20524
6.13.56MHZ 1000W 0190-70099
7.CX-600AS 0190-21755
8.PDX 900RFG 3156024-110C 0190-75075
9.HFV-8000 16.5MHZ 0190-13203
10.LF10A
11.RF Match Bias 0010-13627
12.RF Match 0010-13622




ENI RF GENERATOR ENI NOVA50A-13DF3H0-003/10 (P/N 0190-15316)




OEM28B, NOVA50, AX2115, GMW25



MKS 28B Gen 3qty(any oem-28b)
0190-70100 LF10A 3qty(or LF10)
0190-25116 nova-50a 2qty(any nova-50a)
any ghw25 / nova25
ax2115
cps1001s
0010-13627
0010-33724




MKS 28B RF GENERATOR.




3156115-003/053/203/253

 



    ENI OEM 28B-02

OEM P/N: 0190-01264

Qty: 4 units





1.ENI/MKS GHW25A-13DF3N0-001  

           2.ENI/MKS NOVA-50A-04 



1.ENI/MKS GHW25A-13DF3N0-001  

2.ENI/MKS NOVA-50A-04 



AE Mercury 3KW Automatch

3150274-008

27-255873-00

Qty= 3 units



ENI Generator, PN NOVA-50A-10




1 unit 
eni nova 50 gen.




      3156115-203, RF Generator

Qty: 2pcs





0195-01528 AS00373-02 
MKS D-NET BOARD
Qty 4ea




ENI OEM-25B-01



GHW-50


3152412-149
Qty: 2pcs


High frequency generator RFG 1250 HALO (2.4 kW, 13.56MHz) – 2 pcs.

p/n 660-024637-028

s/n 247212 F/R D

Manufacturer – Advanced Energy.



27-032269-00 OEM-28B-04 Generator,HF,2.75KW,Interlocked



27-130531-00

Mercury 3013, MB (AE 3150274-003)

27-255873-00

Mercury 3013 Match (AE 3150274-008)




MKS NOVA-50


ENI NOVA-50
P/N:0190-48716


Centura-HDP Side GEN

P/N:0190-25116

P/N:0190-48716

NOVA-50A-04

 

0010-18129 TOP LOCAL MATCH ASSY, HDP-CVD

0010-15487 TOP LOCAL MATCH, ULTIMA TE HDP CVD 200MM

0010-18130 SIDE LOCAL MATCH ASSY, ULTIMA HDPCVD

0010-13524 SIDE LOCAL MATCH ASSY, BALANCED SIDE COIL, ULTIMA PLUS

0010-15488 SIDE MATCH ASSY,TE

0190-11225 RF MATCH/E-CHUCK POWER SUPPLY ASSY, 200M

0190-11225 RF MATCH/E-CHUCK POWER SUPPLY ASSY, 200M

---> AE PN is 3155031-036 or -039

 



P/N: 27-255873-00  
 AE Mercury 3013 Match
 AE P/N: 3150274-008
Q’ty : 3 ea



M/N 3152410-100D (S/N. 318734).

M/N 3152410-100D (S/N. 330159)




qty 3 of the MKS 28B RF Generator. 



1.     RFPP LF10A, MPN 3150010-001 P/N: 0190-70100- 3 qty  working condition

2.     MDX-L12M-650 -5 qty working condition

 




Power Generator 3157600-004  PEII 10kW (200~208V)

or

Power Generator 3157600-108  PEII 10kW (400V)

 

Maker: Advanced Energy

QTY: 1 PCS



ENI NOVA-50A GENERATOR  0190-25116


1) Manufacturer:   ENI

2) Description(Model):   NOVA-50A-02 (3.2MHz) Generator

3) Q'ty:   2ea 

 
OEM 28B RF generator


 NOVA RF Generator (NOVA 50A-04)


NOVA-50A-10 ENI GENERATOR 2MHZ 208V 5KW*1pc



Pinnacle/Advanced Energy power supplies.  Part number 3152417-216N


Brand

MODEL

M/N

 P/N

TYPE

AMAT

P5000 CVD MATCH

0010-09750

0020-09357

P5000 CVD MATCH

OK

AMAT

P5000 ETCH MATCH

0010-09416 W

0010-18130

P5000 ETCH MATCH

OK

AMAT

P5000 PVD MATCH

0010-20524

0010-13627

P5000 PVD MATCH

OK

AMAT

BIAS RF MATCH

0010-12194

OK

AMAT 

HE RF BIAS MATCH

0010-33724

OK

AMAT

P5000 DC PSU Units

15V 24V 5V 12V DC PSU

OK

ENI 

NOVA-50A-10

AM200-HDPECVD

0190-15316 AMAT

1.8-2.17M 5300W RF GENERATOR

OK

ENI

NOVA-50A-04

AM200-HDPECVD

0190-25116 AMAT

 2M 5.3KW RF GENERATOR

OK

ENI

NOVA-50A-04

AM200-HDPECVD

0190-19511 AMAT

1.8-2.17M 5300W RF GENERATOR

OK

ENI

GHW50A-13DF3H0-003

AM200-HDPECVD

0190-25115 AMAT

13.56M 5KW RF GENS

OK

ENI

GHW55A-13DF4L0-001

TEL

3D80-000075-15

13.56M 5.5KW  RF GENERATOR

OK

ENI

GHW55A-13DF4L0-002

TEL

3D80-000835-V1

13.56M 5.5KW  RF GENERATOR

OK

ENI 

GHW50A-13DF3L0-006

NOVELLUS

27-370088-00 

13.56M 5.0KW  RF GENERATOR

OK

ENI

GHW50A-13DF3L0-006

LAM

660-178383-001

13.56M 5.0KW  RF GENERATOR

OK

ENI

GHW50A-13DF3H0-004

AMAT-EMAX

0190-08678 

13.56M 5.0KW  RF GENERATOR

OK

ENI

GHW85A-13DF2L0-001

NOVELLUS

27-105447-00

13.56M 8.5KW RF GENERATOR

OK

MKS

SPECTRUM B-5002-01

AMAT

0190-15320W

2M 5KW RF GENERATOR

OK

ENI

GHW12Z-13DF2N0-001

AMAT

0190-13306

13.56M 1.25KW 480V 3P AMAT

OK

ENI

GHW25A-13DF3HO-001

TEL PVD

1D80-091111-12

13.56M 2.5KW RF GENERATOR

OK

MKS

SPECTRUM B-11002-01

11KW 2M

0190-15449

300MM AMAT HDPE-CVD ULTIMA RF 

OK

MKS

SPECTRUM B-11002-01

11KW 2M

0190-22201

300MM AMAT HDPE-CVD ULTIMA RF 

OK

MKS 

SPECTRUM B-10513-00

10.5KW 13.56M

1090-17877

300MM AMAT HDPE-CVD ULTIMA RF 

OK

ENI

ACG-6B-02

LAM

0920-01117

600W,RF GENS ETCH

OK

ENI 

ACG-3B-01

300W,RF GENS

OK

ENI

OEM-25B-01

TEL

27-050151-00

NOVELLUS RF GENERATOR

OK

ENI 

GHW50A-13DF3H0-000

AMAT

5000W,13.56M NOVELLES CVD

OK

MKS/ENI 

SPECTRUM B-3013-08

1005541

3KW,13.56MHZ,RF

OK

ENI

MWD-55LD-04

OXT112

F8,OXT112 CVD

OK

ENI 

MWD-25LD-02

     TEL DRM

3D80-000076-V4

2.5KW RF AUTO MATCH

OK

ENI 

MWD-25LD-06

     TEL DRM

2.5KW RF AUTO MATCH

OK

MKS/ENI 

B-5002-03

     F12 

0190-15320 W

F12,LAM CVD

OK

MKS/ENI 

SUREPOWER QL6513A-12068

27-438022-00

6500W,13.56M,

OK

ENI

GMW25A-2D0F3H0-003

     AMAT 

0190-16511 0190-09834

RF 2MHZ LAM ETCH

OK

ENI

GMW25A-2D0F3H0-001

AMAT 0190-09833

0190-21830

2M 2.5KW RF GENERATOR

OK

ENI

GW2502MA-B1C001-L3

     LAM

660-110685-012

RF GEN,2MHZ,2.5KW,CE

OK

ENI

QUANTA-10D-01

     AMAT

0190-05624

DUAL 900W LF 350KHZ RF GENS

OK

ENI 

DPGD-10-CE

     AMAT

0190-36343

MF GENERATOR,350KHZ 1250W

OK

ENI

NOVA-25A-01

     AMAT HART 

0190-00060

RF GENERATOR,1.8-2.17MHZ 2500W

OK

ENI

OEM-12B3-02

1P 208v 1250W

0190-76028

200MM ETCH PVD

ENI

OEM-12B3-08

3P 208v 1250W

0920-01061

200MM ETCH

OK

ENI

GEW3040MA-F2H00-01

40.68MHZ 3KW

1D80-003506-14

200MM 3000W 40.68MHZ ETCH

OK

ENI

OEM-12B-02(07)

1P 208v 1250W

0190-76048

200MM ETCH

OK

ENI 

OEM-28B-02

     AMAT

0190-01264

AMAT 13.56MHZ 2800W RF GENS

OK

ENI

OEM-28B-04

NOVELLUS

27-850151-00

NOVELLUS 13.56MHZ 2750W RF GENS 

OK

MKS/ASTEX

ASTEX AX2115

1500W.2.45GHZ,microware gens

OK

MKS

DCG200Z

0190-08033

DC24M-Z041300110A

DC POWER 20KW  AMAT

OK

MKS

SPECTRUM B-5002-03

CVD 300MM 5KW 1.8-2.17M

OK

ENI/LAM

DOFBC2-084(2MHZ)

300MM ETCH

660-002295-002

LAM ETCH DUAL FREQ OB2-2M

OK

ENI/LAM

DOFBC2-083(27MHZ)

300MM ETCH

660-002294-R002

LAM ETCH DUAL FREQ OB2-27M

OK

ENI/LAM

DOFBC2-075(2M,27M MATCH)

300MM ETCH

LAM ETCH DUAL FREQ OB2-RF MATCH

OK

ENI

OEM-2000-01M1

     TEL

TEL 13.56MZ 2000W

OK

ENI/LAM

000-1134-076(OB1-2MHZ)

200MM ETCH

660-099877-402

2M 2.5KW RF GENERATOR

OK

ENI/LAM

000-1134-077(OB1-27MHZ)

200MM ETCH

660-099877-302

27.12M 1.8KW RF GENS

OK

ENI/LAM

000-1134-075(2MHZ+27MHZ DUAL)

200MM ETCH

660-

2MHZ+27MHZ DUAL MATCH

OK

LAM RESEARCH

ENCL ONE-BOX FRU DFC2300

660-099877-R201

LAM DFC2300 ETCH ASSEMBLY

OK

MKS/ASTeX

FI20160-3

660-011161-702

Microware SmartPower

ok

AE 

PDX-1250

3156024-114

LF 350KHZ RF GENS

OK

AE

PDX-900-2V

3156024-133

0190-10028

25P I/O.LF RF GENS

OK

AE

PDX-900-2V

3156024-131

0190-08677-002

25P I/O.LF RF GENS

OK

AE 

PDX-1400

3156024-141C

27-028379-00 F/R/C

MF GENERATOR,380KHZ 1400W


AE

PDX-900-2V

3156024-110C

0190-75075

MF GENERATOR,KHZ 900W

OK

AE

MDX-L12M

3152343-100B

0190-70072

DC POWER 12KW

OK

AE

MDX-L12

3152272-000

0190-70086

DC POWER 12KW

OK

AE

MDX-L12M-650

3152344-101B

0190-76192

DC POWER 12KW

OK

AE

MDX-L6

3152317-000A

0190-76006

DC POWER 6KW 

OK

AE

MDX-L6 HALO

3152343-000A

DC POWER 6KW 

OK

AE

MDX-L6M-650

3152313-001B

0190-76192

DC POWER 12KW

OK

AE

APEX-5513

3156115-651

R27-366881-00

5500W,13.56M RF GENS

OK

AE

APEX-5513

3156115-207

27-346753-00

5500W,13.56M RF GENS

OK

AE 

APEX10013 10KW/13

3156117-006 A

04-276624-00

RF 13.56M 10KW 

OK

AE

APEX3013

3156113-008 C

0920-00085

3KW 13.56M RF GENS

OK

AE 

Pinnacle plus+ 10kw

3152536-358 A

3P 480V,PFP,HH.P16,M/S

40KHZ 10KW PLUS DC POWER

OK

AE

Pinnacle 6kw

3152411-129

0190-34931-000

6KW 480V 400-1000V PFP YJ UHF

OK

AE

pinnacle 20kw

3152412-243

0190-23671-001

DC POWER 20KW

OK

AE

Pinnacle 20kw

3152411-300 A

0190-34647-000

20KW  208V PFP HJ RING LUG

OK

AE

pinnacle 20kw

3152412-233 D

0190-25724-001

20KW  480V PFP 400-1000V

OK

AE

RF MATCH

3156115-704

1021925 F/R A

NOVELLUS RF MATCH

OK

AE

RF MATCH AZX90

3155031-004

AMAT AME 8300

RF AUTO MATCH AMAT Bias match

OK

AE

RF MATCH AZX90

3155031-043

0190-30486-000

RF AUTO MATCH AMAT CVD

OK

AE

RF MATCH AZX63

3155031-000 G

RF AUTO MATCH AMAT CVD

OK

AE

RF MATCH  3KW

3155077-001B

RF FIXED MATCH MFA

RF MATCH  20-j28 CVD

OK

AE 

RF MATCH  3KW

3155094-003

RF FIXED MATCH MFA

RFG2K-2V 7-j15 RF MATCH

OK

AE

RF MATCH

3155132-008 A

0190-34238-003

RF AUTO MATCH

ok

AE

RF MATCH

3155031-014E

RF MATCH PVD

ok

AE

NAVIGATOR-1013 RF MATCH

3155126-011 C

RF MATCH PVD

ok

AE

RFG3001

3155089-004(5)

RF GENERATOR 3KW 13.56MHZ

OK

AE

RFG3001

3155089-008 B

RF GENERATOR 3KW 13.56MHZ

OK

AE

RFG5500

3155051-015

27-115617-00

15P I/O 5KW 13.56M HF RF GENS

OK

AE

RFG3000

3155038-005B

27-034212-00 F/R D

15P I/O 2.75KW 13.56M HF RF GENS

OK

AE

RFG3000

3155038-004A

25P I/O 3KW 13.56M HF RF GENS

OK

AE

RFG-1250 HALO

3155027-026C

660-024637-026

25P I/O 960W RF 

OK

AE

RFG-1250 HALO

3155027-005C

660-024637-013

YERROW

OK

AE

RFG-1250

3155027-008J

660-024637-008

25P I/O

OK

AE

RFG-1251

3155107-001C

3*208V 1250W 13.56M RF 

OK

Email your inquire,I'll offer you the best price!
 
 

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